Performance Test of Fresnel Zone Plate with 50 nm Outermost Zone Width in Hard X-ray Region
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概要
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A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 μm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30 nm.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-04-15
著者
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Takeuchi Akihisa
Japan Synchrotron Radiation Res. Inst. (jasri) 1-1-1 Kouto Mikazuki-cho Sayo-gun Hyogo 679-5198 Jpn
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SUZUKI Yoshio
Japan Synchrotron Radiation Research Institute
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TAKANO Hidekazu
College of Humanities and Sciences, Nihon University
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Takenaka Hisataka
Ntt Advanced Technology Corp.
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Takano Hidekazu
College of Humanities and Sciences, Nihon University, Setagaya, Tokyo 156-8550, Japan
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