Suppression of Corrugated Boundaries in Multilayer Fresnel Zone Plate for Hard X-Ray Synchrotron Radiation Using Cylindrical Slit
スポンサーリンク
概要
- 論文の詳細を見る
Corrugated zone roughness of a circular Cu/Al multilayer Fresnel zone plate (FZP) was successfully suppressed. Such a zone corrugation was often observed in the concentric multilayers prepared using a conventional sputtering apparatus. The zone corrugation is a consequence of the oblique component of the deposition flux (i.e. shadowing effect). We therefore set a cylindrical slit (a linear slit on the surface of a stainless steel cylindrical shield) between the target and the substrate in order to eliminate the oblique flux. As a result, the zone corrugation was not observed using a scanning ion microscope (SIM).
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2001-07-15
著者
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Takeuchi Akihisa
Japan Synchrotron Radiation Res. Inst. (jasri) 1-1-1 Kouto Mikazuki-cho Sayo-gun Hyogo 679-5198 Jpn
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YASUMOTO Masato
Photonics Research Institute
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TAMURA Shigeharu
Photonics Research Institute
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KAMIJO Nagao
Japan Synchrotron Radiation Research Institute
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SUZUKI Yoshio
Japan Synchrotron Radiation Research Institute
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AWAJI Mitsuhiro
Japan Synchrotron Radiation Research Institute
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TAKANO Hidekazu
Japan Synchrotron Radiation Research Institute
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KOHMURA Yoshiki
RIKEN Harima Institute
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HANDA Katsumi
Ritsumeikan University
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Kohmura Yoshiki
RIKEN Harima Institute, SPring-8, 1-1-1 Kouto, Mikazuki, Sayo-gun, Hyogo 679-5148, Japan
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Awaji Mitsuhiro
Japan Synchrotron Radiation Research Institute, SPring-8, 1-1-1 Kouto, Mikazuki, Sayo-gun, Hyogo 679-5198, Japan
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Takano Hidekazu
Japan Synchrotron Radiation Research Institute, SPring-8, 1-1-1 Kouto, Mikazuki, Sayo-gun, Hyogo 679-5198, Japan
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Kamijo Nagao
Japan Synchrotron Radiation Research Institute, SPring-8, 1-1-1 Kouto, Mikazuki, Sayo-gun, Hyogo 679-5198, Japan
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Tamura Shigeharu
Photonics Research Institute, AIST, AIST Kansai, 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan
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Tamura Shigeharu
Photonic Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Ikeda, Osaka 563-8577, Japan
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