X-ray Holographic Microscopy using Total-Reflection Mirror Interferometer

概要

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An optical system for X-ray holographic microscopy has been developed using a Fresnel zone plate objective lens and a wavefront-dividing interferometer with total-reflection mirror optics. A plane mirror is placed behind the back focal plane of the objective lens, and half of a divergent wave from the focal point is deflected by the total-reflection mirror and overlapped onto the magnified image of the object. This interferometer is an analogue of a Lloyd's mirror interferometer, which is well known in visible light optics. By using fully coherent illumination to the objective lens, holographic microscopy was successfully performed. A quantitative phase image was obtained by the fringe scan method using a rotating phase shifter. The spatial resolution of the phase image is approximately 200 nm, and the phase sensitivity is estimated to be better than $\lambda/60$ at an X-ray wavelength of 1.0 Å.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2008-11-25