Diffraction-limited Microbeam with Fresnel Zone Plate Optics in Hard X-Ray Regions
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概要
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A hard X-ray microbeam with zone plate optics has been tested, and preliminary experiments on scanning microscopy have been performed. A Fresnel zone plate fabricated by the electron-beam lithography technique is used as an X-ray focusing device. The material of the zone structure is tantalum with thickness of about 1 $\mu$m, and the outermost zone width of the zone plate is 0.25 $\mu$m. A focused spot size measured by knife-edge scanning is 0.3 $\mu$m at an X-ray energy of 8 keV@. Closer evaluation of the spatial resolution has been done by observing resolution test patterns in a scanning X-ray microscopy experiment, and fine patterns with a 0.2 $\mu$m-structure have been resolved.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2001-03-15
著者
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Takenaka Hisataka
Ntt Advanced Technology Corp.
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Ohigashi Takuji
Institute Of Applied Physics University Of Tsukuba
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Takano Hidekazu
Spring-8
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Takeuchi Akihisa
Spring-8
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Suzuki Yoshio
Spring-8
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Takano Hidekazu
SPring-8, Mikazuki, Hyogo 679-5198, Japan
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