Particle-In-Cell Monte-Carlo Simulation of Capacitive RF Discharges: Comparison with Experimental Data
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概要
- 論文の詳細を見る
Particle-in-cell (PIC) simulations with Monte Carlo collision (MCC) are performed in argon capacitive rf discharges for the comparison with experimental data. The electron density and electron temperature along with the electron energy probability function are calculated for various gas pressures. It is shown that the sufficient number of simulation particles is one of the critical conditions for the reliability of PIC-MCC simulation. From the simulation with a large number of superparticles, a good agreement with experimental data measured by Godyak et al. [Phys. Rev. Lett. 65 (1990) 996] is obtained.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2005-04-15
著者
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Lee Jae
Department Of Acupuncture & Moxibustion College Of Oriental Medicine
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Kim Hyun
Department Of Agricultural Bio-resources National Academy Of Agricultural Science Rural Development
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Kim Hyun
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea
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Manuilenko Oleg
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea
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Kim Hyun
Department of Advanced Material Engineering, Daejeon University, Daejeon 300-716, Republic of Korea
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Lee Jae
Department of Electronic and Electrical Engineering, Pohang University of Science and Technology, Pohang 790-784, Republic of Korea
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