Laser Damage Properties of Optical Coatings with Nanoscale Layers Grown by Atomic Layer Deposition
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概要
- 論文の詳細を見る
The notable change in the structure and laser damage properties of coatings using periodically incorporated Al2O3 nanoscale layers grown by atomic layer deposition is demonstrated. Coatings with a nanoscale laminated structure had a higher transparency than pure TiO2 films grown at 400°C. The laser damage resistance of nanolaminate coatings is three times larger than that of pure TiO2 films. The morphology of laser-induced damage shows a significant reduction in the number of damage sites.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2004-03-15
著者
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JITSUNO Takahisa
Institute of Laser Engineering
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Yamanaka Tatsuhiko
Institute Of Laser Engineering (ile) Osaka University
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Motokoshi Shinji
Institute For Laser Technology
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Zaitsu Shin-ichi
Institute Of Laser Engineering Osaka University
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Nakatsuka Masahiro
Institute for Laser Technology, 1-8-4 Utsubo-Honmachi, Nishi-ku, Osaka 550-0004, Japan
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Yamanaka Tatsuhiko
Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Zaitsu Shin-ichi
Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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