Enhancement of Surface-Damage Resistance by Removing Subsurface Damage in Fused Silica and Its Dependence on Wavelength
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概要
- 論文の詳細を見る
A combination of several surface etching techniques and a superprecise polishing process was used to remove subsurface damage from fused silica surface. The effect of subsurface damage removal on laser-damage resistance was determined by measuring the laser-induced damage threshold (LIDT) at 1064 nm, 532 nm, 355 nm and 266 nm. Surface-damage resistance was enhanced as the irradiated laser wavelength shortens. At 266 nm, the greatest advantage was obtained from virtually subsurface removed surfaces. The surface LIDT improved 2.8-fold compared with that of conventionally polished fused silica surfaces.
- Japan Society of Applied Physicsの論文
- 2004-09-15
著者
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KAMIMURA Tomosumi
Department of Electronics, Information and Communication Engineering, Osaka Institute of Technology
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HORIBE Hideo
Kochi National College of Technology
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JITSUNO Takahisa
Institute of Laser Engineering
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AKAMATSU Shigenori
Kochi National College of Technology
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SHIBA Haruya
Kochi National College of Technology
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SAKAMOTO Takayasu
Institute of Laser Engineering, Osaka University
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OKAMATO Takayuki
Okamoto Optics Work, Inc.
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Motokoshi Shinji
Institute For Laser Technology
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Yoshida Kunio
Department Of Chemical Engineering University Of Tokyo
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Motokoshi Shinji
Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Horibe Hideo
Kochi National College of Technology, 200-1 Monobe, Nankoku City, Kochi 783-8508, Japan
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Okamato Takayuki
Okamoto Optics Work, Inc., 8-34 Haramachi, Isogo-ku, Yokohama, Japan
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Akamatsu Shigenori
Kochi National College of Technology, 200-1 Monobe, Nankoku City, Kochi 783-8508, Japan
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Sakamoto Takayasu
Institute of Laser Engineering, Osaka University, 2-6 Yamada-oka, Suita, Osaka 565-0871, Japan
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Kamimura Tomosumi
Department of Electronics Information and Communication Engineering, Osaka Institute of Technology, 5-16-1 Omiya Asahiku, Osaka, Osaka 535-8585, Japan
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