Microdisplacement Measurement Using a Liquid-Delay-Line Oscillator

概要

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A technique for measuring micromechanical displacement is proposed using a liquid-delay-line oscillator, which consists of two pairs of arch-shaped interdigital transducers (IDTs) on a double-layered substrate composed of an acrylic plate and a piezoelectric ceramic plate, a reflecting plate and a water layer. In the use of the double-layered substrate, the seventh higher-order mode of leaky Lamb wave is favorable for the oscillator construction, because of high phase velocity and large transducer efficiency, while retaining sufficient mechanical strength, compared with the use of an only piezoelectric ceramic plate. The mechanical displacement is evaluated as a function of oscillation frequency, on the basis of the acoustical delay length, linearly dependent on the thickness of the water layer. The present technique is promising for sensing microdisplacement as a precise and convenient method.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-09-15