Measurement Technique for Mechanical Vibration Using a Thickness-Mode Piezoelectric Transducer with Two Comb-Shaped Electrodes

概要

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A technique for measuring mechanical vibration is proposed using a thickness-mode piezoelectric transducer. The transducer has three electrode groups, which are an interdigital arrangement of two comb-shaped electrodes mounted on one surface of a piezoelectric ceramic plate and a counter electrode on the other surface of the ceramic plate. A combination of one of the two comb-shaped electrodes and the counter electrode operates as a thickness-mode vibrator for radiating a longitudinal wave into a water layer. The other comb-shaped electrode is used to detect a reflected ultrasound beam from the vibrating diaphragm, and is also applicable for receiving an electromagnetically coupled signal from an electric signal applied to the input comb-shaped electrode. Interference between the reflected signal and the coupled signal results in a change of the amplitude of the output signal, corresponding to the mechanical displacement of the diaphragm. This technique has the advantages of excellent transducer performance and concise signal processing.
社団法人応用物理学会の論文
2002-11-30