Growth and Characterization of Indium Tin Oxide Films Grown on Polymer Substrates by DC Magnetron Sputtering
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概要
- 論文の詳細を見る
Thin films of indium tin oxide (ITO) have been deposited on unheated polymer substrates by the DC magnetron sputtering technique. The sheet resistance of the films increased with time on exposure to atmosphere for stretched and cast acrylic substrates which was not seen in the case of polycarbonate substrate. The scanning electron microscopy studies carried out on these films corroborated the result. The transmission of the films was ${\sim}80$% in the visible region for all the films. The X-ray diffraction pattern in all the three cases showed preferred orientation of In2O3 in the (440) planes.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-06-15
著者
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Bhaumik Suchandra
Energy Research Unit Indian Association For The Cultivation Of Science
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Barua Asok
Energy Research Unit Indian Association For The Cultivation Of Science
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Barua Asok
Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Kolkata 700032, India
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