Diamond-Like Carbon Films Prepared by Photochemical Vapour Deposition
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概要
- 論文の詳細を見る
Diamond-like carbon films have been successfully grown at comparatively low substrate temperature (250℃) on single-crystal silicon substrates by the photochemical vapour deposition technique. Raman spectroscopy and scanning electron microscopy studies have shown the formation of diamond particles embedded in the diamondlike carbon film. However, some amount of graphitic carbon is present in the material. The presence of sp^3 as well as sp^2 hybridised carbon atoms is also confirmed by infrared vibrational spectroscopy. Extremely high transparency (>90%) for 500Å film from the near-infrared to visible regions is an indication of the high optical gap of the film.
- 社団法人応用物理学会の論文
- 1993-10-15
著者
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Middya Abdul
Energy Research Unit Indian Association For The Cultivation Of Science
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BARUA Asok
Energy Research Unit, Indian Association for the Cultivation of Science
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RAY Swati
Energy Research Unit, Indian Association for the Cultivation of Science
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Barua Asok
Energy Research Unit Indian Association For The Cultivation Of Science
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Ray Swati
Energy Research Unit Indian Association For The Cultivation Of Science
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