Lamb-Wave-Type High Frequency Resonator

概要

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In this study, we examined Lamb wave propagation on an AT cut quartz substrate; we carried out theoretical analyses and fundamental experiments using Lamb waves. Consequently, we validated that it is operable at an approximately seven times higher frequency than that of a conventional AT cut vibrator and that it also uses an approximately two times higher frequency than that of a surface acoustic wave resonator on the same substrate, assuming that they are of the same shape. Next, we applied a resonator utilizing Lamb waves, and we measure the resonance characteristics and the reflection coefficient. Results proved that the resonance characteristics were enhanced by thickening the Al film in the reflector fabricated on the substrate surface and that the reflection coefficient per reflector is considerably large in comparison with that in the case of surface acoustic waves.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-05-15