Surface Acoustic Wave Properties on Proton-Exchanged 128°-Rotated Y-Cut LiNbO_3
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概要
- 論文の詳細を見る
The characteristics of surface acoustic waves on proton-exchanged 128°-rotated Y-cut LiNbO_3 were investigated at a frequency of 100 MHz. The changes of the phase velocity and the electromechanical coupling coefficient as a function of the proton-exchange depth were measured. From these experiments, the elastic constants and the piezoelectric constants of the proton-exchanged layer were determined. The effects of annealing on the phase velocity and the surface acoustic wave propagation loss were also measured.
- 社団法人応用物理学会の論文
- 1993-05-30
著者
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NAKAGAWA Yasuhiko
Faculty of Engineering, Yamanashi University
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KAKIO Shoji
Faculty of Engineering, Yamanashi University
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Nakagawa Yasuhiko
Faculty Of Engineering Yamanashi University
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Nakagawa Yasuhiko
Facully Of Engineering Yamanashi University
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Kakio Shoji
Faculty Of Engineering Yamanashi University
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Matsuoka Junji
Department Of Materials Science And Engineering Faculty Of Engineering University Of Siga Prefecture
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MATSUOKA Junji
Faculty of Engineering, Yamanashi University
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