Fabrication of Ta_2O_5 Piezoelectric Thin Film by the Linear Rapid Thermal Annealing Method and Measurement of Piezoelectricity
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-05-30
著者
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NAKAGAWA Yasuhiko
Faculty of Engineering, Yamanashi University
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Nakagawa Yasuhiko
Faculty Of Engineering Yamanashi University
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Nakagawa Yasuhiko
Facully Of Engineering Yamanashi University
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IGARASHI Tomomi
Faculty of Engineering, Yamanashi University
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Igarashi Tomomi
Faculty Of Engineering Yamanashi University
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