Shear-Horizontal-Type Surface Acoustic Waves on Quartz with Ta2O5 Thin Film

概要

論文の詳細を見る
The propagation characteristics of two modes of surface acoustic waves (SAWs) on ST quartz with a tantalum pentoxide (Ta2O5) thin film are investigated theoretically and experimentally. One is the pure shear-horizontal (SH)-type SAW and the other is the Love-wave-type SAW converted from the leaky SAW (LSAW). For these SAWs, stronger energy trapping effects on the surface can be expected by loading the substrate with the Ta2O5 thin film, because this film has a relatively high density. In fact, the film thickness of the Ta2O5 film required to obtain the minimum insertion loss and the maximum $K^{2}$ for the SH-type SAW on ST-90°X quartz is around 0.01 $\lambda$, which is approximately one-fourth of that reported for silicon dioxide film. Furthermore, the attenuation of the LSAW on ST-33°X quartz was reduced by loading with the Ta2O5 film because the LSAW becomes the Love-wave-type SAW without attenuation.
2003-05-15