Vibration Velocity Limitation of Transducer Using Titanium-Based Hydrothermal Lead Zirconate Titanate Thick Film
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概要
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High-intensity vibration operation of a titanium based lead zirconate titanate (PZT) thick film longitudinal vibrator fabricated using a hydrothermal method is described in this paper. Higher limitation of vibration velocity is very important for high output power actuators. For sensors, linearity of the frequency response is an important factor. To investigate the performance of the PZT film material, we changed the deposition process of the hydrothermal method and increased the thickness of the PZT film. As a result, the maximum vibration velocity of the longitudinal vibrator was 2.5 m/s (0 to peak value). This value was almost 3-fold that of bulk PZT material. The vibration velocity was limited by the value of maximum stress. The maximum stress of the hydrothermal PZT transducer was larger than that of the bulk PZT transducer. At such high-intensity vibration of over 2 m/s or driving voltage of 150 Vp-p, the frequency response curves were not linear and the jumping phenomenon was observed.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-05-15
著者
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KURIBAYASHI Minoru
Department of Electrical & Electronics Engineering, Faculty of Engineering, Kobe University
-
Higuchi Toshiro
Department Of Precision Engineering School Of Engineering The University Of Tokyo
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Kobayashi Yutaka
Department Of Applied Physics Fukui University
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Kurosawa Minoru
Department of Advanced Applied Electronics, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226-8502, Japan
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Higuchi Toshiro
Department of Precision Machinery Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
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Kanda Takefumi
Graduate School of National Science and Technology, Okayama University, 3-1-1 Tsushima-naka, Okayama 700-8530, Japan
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