Cylindrical Micro Ultrasonic Motor Utilizing Bulk Lead Zirconate Titanate (PZT)
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概要
- 論文の詳細を見る
Ultrasonic motors are expected to be used as microactuators because of their high torque, low speed and simple construction. We have already reported cylindrical-shaped micro ultrasonic motors which utilized a lead zirconate titanate (PZT) thin film. In this paper, we discuss a micro ultrasonic motor composed of bulk PZT. The stator transducer had dimensions of 2.4 mmin diameter and 10 mm length. The maximum revolution speed was 650 rpm and the maximum output torque was 0.22 mNm with the condition of 100 V_<p-p> input voltage. The driving frequency was 85 kHz. The comparison between time bulk PZT stator transducer and the previous PZT thin film transducer was considered. From this consideration, the e_<31> piezoelectric factor was determined to be the main factor for different output torques. The bulk PZT motor was applied to robot hands which was a simple procedure. A two axes hands application was successfully operated with a step motion and carried up to a 10 g load.
- 社団法人応用物理学会の論文
- 1999-05-30
著者
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Morita Takeshi
Department of Living Environmental Science, Fukuoka Women's University
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Higuchi Toshiro
Department Of Precision Engineering The University Of Tokyo
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Kurosawa Minoru
Department Of Precision Machinery Engineering Graduate School Of Engineering The University Of Tokyo
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Higuchi Toshiro
Department Of Precision Machinery Engineering Graduate School Of Engineering The University Of Tokyo
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Kurosawa Minoru
Department Of Advanced Applied Electronics Tokyo Institute Of Technology
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Morita Takeshi
Department Of Living Environmental Science Fukuoka Women's University
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Higuchi Toshiro
Department Of Precision Engineering School Of Engineering The University Of Tokyo
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Morita Takeshi
Department Of Anesthesiology School Of Dental Medicine Tsurumi University
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