Si MIS Solar Cells by Anodization
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概要
- 論文の詳細を見る
Formation of thin insulating SiO_2 films by anodic oxidation of silicon was studied as a part of investigating an alternative method of fabricating low-cost silicon MIS solar cells. Anodization in the constant-voltage mode was carried out in nonaqueous ethylene glycol solution. The film thickness was carefully measured using an ellipsometer of wavelength 6238 Å. MIS cell performance was evaluated by comparing the open circuit voltage V_<oc> and the short circuit current density I_<sc> with those of the bare Schottky cell (without anodization) under illumination by a tungsten lamp. It was found that anodization in the constant-voltage mode can increase V_<oc> without reducing I_<sc>, and that anodization in the constant-voltage mode is more controllable and reproducible. The optimum formation voltage which gives the maximum V_<oc> of the MIS cell depends on the forming voltage of oxide. A brief discussion on the mechanism for V_<oc> increase is given.
- 社団法人電子情報通信学会の論文
- 1993-01-25
著者
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Kobayashi Yutaka
Department Of Environmental Medicine Graduate School Of Medical Sciences Kyushu University
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Nomura Shigeru
Department Of Electrical And Electronic Engineering Faculty Of Engineering Muroran Institute Of Tech
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Nomura Shigeru
Department Of Electrical And Electronic Engineering Muroran Institute Of Technology
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Takada Kiyoyasu
Department Of Electrical And Electronic Engineering Muroran Institute Of Technology
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Nanjo Junji
Department of Electronic Engineering, Kitami Institute of Technology
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Mostafa KamalAbuHena
Department of Electrical and Electronic Engineering, Muroran Institute of Technology
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Miyazaki Toshihide
Department of Electrical and Electronic Engineering, Muroran Institute of Technology
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Nanjo Junji
Department Of Electronic Engineering Kitami Institute Of Technology
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Miyazaki Toshihide
Department Of Electrical And Electronic Engineering Muroran Institute Of Technology
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Mostafa Kamalabuhena
Department Of Electrical And Electronic Engineering Muroran Institute Of Technology
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Kobayashi Yutaka
Department Of Cardiovascular Surgery Iwaki Kyoritsu General Hospital
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Kobayashi Yutaka
Department Of Electrical And Electronic Engineering Muroran Institute Of Technology
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Kobayashi Yutaka
Department Of Applied Physics Fukui University
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