100-nm-Scale Alignment using Laser Beam Diffraction Pattern Observation Techniques and Wafer Fusion for Realizing Three-Dimensional Photonic Crystal Structure
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概要
- 論文の詳細を見る
We previously proposed a new method for realizing three-dimensional photonic crystals in the optical wavelength region, where two-dimensional basic structures are aligned using a laser beam diffraction pattern observation techniqueand stacked by means of a wafer fusion.In this method, it is essential to align the two-dimensional basic structures with an accuracy of optical wavelength order at wafer fusion.In this work, we develop an alignment system based on a laser beam diffraction patternobservation technique and achieve alignment and wafer fusion with accuracy of less than 100 nm, for the first time.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1998-06-15
著者
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Noda Susumu
Department Of Electrical Engineering Kyoto University
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Yamamoto Noritsugu
Department Of Electronic Science And Engineering Kyoto University
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Yamamoto Noritsugu
Department of Electronic Science and Engineering, Kyoto University, Yoshidahonnmachi, Sakyo-ku, Kyoto 606-8501, Japan
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Noda Susumu
Department of Electric Science and Engineering, Kyoto University
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