Spectroscopic measurement of DC plasma jet in diamond synthesis
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概要
- 論文の詳細を見る
In synthesis of diamond with a plasma jet under medium pressure, the morphology of the deposited particles depends strongly on the ratio of the methane gas flow rate to the hydrogen gas flow rate and the distance from the feed ring exit to the substrate. The relationship between the morphology of the deposited particles and the chemical species in the plasma jet is studied by means of emission spectroscopy, with a view toward achieving large-area deposition at a high rate. The intensity ratio of the CH to the Hα spectrum is strongly correlated with the quality of the diamond synthesized and the deposition area.
- 応用物理学会の論文
- 1997-07-30
著者
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Fukumasa Osamu
Department Of Electrical And Electronic Engineering Faculty Of Engineering
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Sakiyama Satoshi
Department Of Electrical And Electronic Engineering Faculty Of Engineering Yamaguchi University
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Kobayashi Tsuyoshi
Department Of Applied Biological Science Faculty Of Agriculture Kagawa University
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Sakiyama Satoshi
Department of Electrical and Electronic Engineering, Faculty of Engineering, Yamaguchi University,
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Murakami Tomohide
Department of Electrical and Electronic Engineering, Faculty of Engineering, Yamaguchi University,
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