Measurement of Terrace Width Distribution on an Si(110) Surface Using High-Temperature Scanning Tunneling Microscopy
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概要
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High-temperature scanning tunneling microscopy is used to study the statistical distribution of terrace width on an Si(110) surface at 720° C. It is confirmed that the terrace width is fitted by the Gaussian distribution, standard deviations (σ) of which are proportional to the mean terrace width. It is considered that the step-step interaction potential energy is Ax-2 (x: normal distance to the step edge and A: proportionality constant). As the mean value of the main peak is 19.27 nm and the step height 0.19 nm, it is confirmed that the surface is oriented within 1° from the (110) surface.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1997-07-15
著者
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SATO Tomoshige
JEOL Ltd.
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SUEYOSHI Takashi
JEOL Ltd.
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YAMAMOTO Youiti
JEOL Ltd.
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Iwatsuki Masashi
Jeol Ltd
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Yamamoto Youiti
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196, Japan
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Sueyoshi Takashi
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo 196, Japan
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