DC 2 極スパッタ法によるCo-Cr薄膜の作成

概要

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Co-Cr films were deposited by DC sputtering on pyrex glass and polyimide film. The crystal structure, the composition ratio and the M-H hysteresis loop of the films were investigated by X-ray diffractmeter (XD), Auger electron spectroscopy (AES) and vibrating sample magnetometer (VSM), respectively. The c-axis of Co-Cr sputtered film is oriented perpendicular to the film plane. The angle of half-width of the rocking curve in (002) plane ranges from 10° to 13°. The Co/Cr atomic ratio (at. %) in the films is 6.7. The existence of oxygen is observed in excess at a thin layer (50Å) near the film surface. When the perpendicular magnetic field is applied to the film plane, the M-H hysteresis loop (M-H⊥) shows a rectangular loop and its squareness ratio from 0.8 to 0.9 is obtained. Saturation magnetization and coercive force in M-H⊥ are from 580 to 650 emu/cc and from 400 to 600 Oe respectively.
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