プラズマディスプレイパネル用MgO薄膜における新しい二次電子放出量の評価方法

概要

論文の詳細を見る
Quantitative measurement of the surface potential and amount of charging under electron beam irradiation have been performed. The surface potential was measured by a secondary electron method. The results have revealed that the surface potential is induced by the sample current, where the sample behaves as a resistor. The amount of charging was obtained by time integration of the current contributing to charging, which was defined as the difference between the beam current and the sum of the sample and secondary electron currents. The amount of charging was found to be independent on the beam current under the present experimental condition. The present results have revealed that the present technique is well worthy to be applied to the study of the secondary electron emission from MgO film used as a protecting insulator in the plasma display panel cell.
日本真空協会の論文
2003-04-20