基礎から学ぶマススペクトロメトリー/質量分析の源流第9回　Secondary Ion Mass Spectrometry (SIMS)，クラスターSIMS，帯電液滴衝撃SIMS

概要

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The use of secondary ion mass spectrometry (SIMS) to characterize inorganic, organic and biological materials has undergone significant and multiple advances in the past thirty years. Additional development in cluster ion sources that started in the early 1990s laid the ground work for the significant increase in SIMS investigations in material science. The continuing scaling trend leads to a drastic reduction in film thicknesses which increases the demands for very high depth resolution, ideally a multilayer system with the depth resolution in the order of 0.5 nm. Recently, the electrospray droplet impact (EDI) has been developed that uses the atmospheric pressure electrospray as a cluster ion source. EDI/SIMS is very high-sensitive and EDI is capable of very shallow surface etching without the damage left on the etched surface. In this chapter, the fundamentals and applications of EDI to the surface analysis are dealt with.
日本質量分析学会の論文