パリレンピールオフ法を用いたPEDOT:PSSパターニング

概要

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We have developed and characterized a technique of patterning PEDOT:PSS (poly(3,4-ethylenedioxythiophene): polystyrenesulfonate) film with a Parylene peel-off method. PEDOT:PSS has characteristics of transparency and high conductivity which are expected to replace transparent ITO (indium tin oxide) electrodes for flat panel displays. But existing technology of inkjet printing decreased its conductivity by mixing a binder, while the other method with electrochemical etching could not completely remove PEDOT:PSS film. To solve these problems, we proposed a process which consisted of negative patterning of Parylene film, coating of PEDOT:PSS and peeling off of Parylene film with the undesired-area of PEDOT:PSS. To peel off the Parylene from the substrates, the control of heating process of PEDOT:PSS under Parylene glass transition temperature was found to be required. The proposed process revealed that the conductivity was almost the same even after the process and its resolution reached down to 20 μm. Finally, the 300-μm-wide electrodes were fabricated through the process, which leads to replacement of ITO for displays.