J0202-1-6 MEMSセンサを用いた昆虫型羽ばたき翼における差圧計測(生物の機能・運動と模倣(1))

概要

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An insect generates differential pressure between the upper and lower surface of its wings by flapping motion. The insect flies by utilizing that pressure difference as aerodynamic force. In the present study, a high-sensitive sensor utilizing MEMS technology was fabricated to measure the differential pressure. A piezoresistance cantilever was used as the differential pressure sensor. The size of the sensor was 1.5 × 1.5 × 0.3 mm^3, which was small enough not to interfere with the wings under flapping state. The measurement range and resolution were 100 Pa and 0.1 Pa, respectively. By fixing the sensors to an artificial insect wing surface, we demonstrated that the differential pressure distribution was enabled to measure.
社団法人日本機械学会の論文
2009-09-12