Fabrication of metal nanoparticles as catalyst at low temperature and growth of silicon nanostructures
スポンサーリンク
概要
- 論文の詳細を見る
We firstly investigated the effect of hydrogen radical treatment to fabricate metal nanoparticles as catalyst, which is used for synthesizing one dimensional nanostructure, from metal oxide film at low temperature as 200°C. The metal nanoparticles with spherical shape were successfully fabricated after hydrogen radical treatment. Their surface shapes were clearly changed with increasing the hydrogen radical treatment time at same temperature. In addition, silicon nanostructures after fabrication of metal nanoparticles were grown at varied temperatures. The ball- and wire-like silicon nanostructures at 200°C and 400°C were synthesized, respectively. Their structure depends strongly on the growth temperature.
- The Institute of Electronics, Information and Communication Engineersの論文
著者
-
Aoyagi Minoru
Department Of Electrical And Electronics Engineering Nippon Institute Of Technology
-
Kamisako Koichi
Department of Electrical and Information Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Nakamachi, Koganei, Tokyo 184-8588, Japan
-
Tomitsuka Yoshihiro
Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan
-
Kamisako Koichi
Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology
-
Jeon Minsung
Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology
-
Maishigi Kazuya
Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology
-
Uchiyama Hisashi
Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology
-
Tomitsuka Yoshihiro
Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology
関連論文
- Tantalum Oxide Films Formed by UV Photo-CVD Using Ozone and TaCl_5
- Gas Phase Reaction Kinetics in Mercury-Photosensitized Decomposition of SiH_4 : Techniques, Instrumentations and Measurement
- 14. A Trial of Combined Stereotaxic Approach to Small ArteriovenousMalformation in the Deep Brain Tissue (PROCEEDINGS OF THE Vth ANNUAL MEETING OF THE JAPAN SOCIETY FOR RESEARCH IN STEREOENCEPHALOTOMY)
- 12. Stereotactic Transsphenoidal Cryohypophysectomy in Acromegaly : Clinical and Endocrinological Evalution
- 178. The Roentgen Diagnosis of the Whiplash Injury
- Analysis of Deposition Rate Distribution in the Photo-CVD of a-Si by a Unified Reactor with a Lamp
- Relationship between Contact Voltage Drop and Frictional Coefficient under High-current Sliding Contact
- Fabrication of Carbon Nanotubes and Byproducts by Arc Discharge in DC Motors
- Electrical Conduction of Polyethylene Telephthalate Films
- Stress in Pulsed-Laser-Crystallized Silicon Films
- Effects of Hydrogen Radical Treatment on Fabrication of Catalyst Nanoparticles from Metal Oxide Film at Low Temperature and Synthesis of Silicon Nanowires
- Effect on Al2O3 Doping Concentration of RF Magnetron Sputtered ZnO:Al Films for Solar Cell Applications
- Fabrication of metal nanoparticles as catalyst at low temperature and growth of silicon nanostructures