F-52 二流体同時制御による省エネ型水噴霧システムの開発その2

概要

論文の詳細を見る
Direct humidification using compressed air atomizer is one of the conventional methods at printing factory. Atomized water removes heat from air when it evaporates so it contributes to both energy-saving humidification and air-cooling. In winter, at semiconductor factory, there is huge amount of humidification and air-cooling but the conventional atomizing system cannot keep the factory with constant humidity. We have improved the control system that can keep the humidity constant using dual control valves. The valves are controlled each opening rate by analog IO calculation unit. It makes the droplets size to fixed and the amount of air to minimum and also can keep the humidity inside f3%. Now we will introduce the result of saving-energy at semiconductor factory in which this system have newly added.
社団法人空気調和・衛生工学会の論文
2004-08-20