S043014 CrN薄膜の密着性に及ぼす基板前処理及び基板材料の影響([S04301]環境調和型の表面改質および薄膜コーティング(1))

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In this study, influence of substrate material and ion bombardment pretreatment on adhesion of CrN film is examined on the basis of surface free energy measurement. Four materials: pure aluminum alloy, super duralumin, high-speed tool steel, and pure titanium alloy are used as substrates. Before CrN deposition, ion bombardment pretreatment is performed in order to remove surface contamination. Ion bombardment process is carried out in nitrogen or argon atmosphere under various gas flow rate. Surface free energy is measured by sessile drop method using distilled water and methylene iodide. Critical load of CrN film is examined using the scratch tester. The influence of venting after ion bombardment process on the critical load is also examined. As a result, surface free energy, especially polar component, decreased after ion bombardment process. Critical load decreased with increasing the polar component of surface free energy. The critical load increases with decreasing the polar component of surface free energy, in particular, SKH-2 substrate.
一般社団法人日本機械学会の論文
2011-09-11