2-4 液体窒素冷却による粘弾性樹脂材料の超精密加工(OS2-2 三次元の微細形状創成技術)

概要

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Study on flow of fluids in extended nanospace attracts many researchers. The extended nanospace locates the gap between the targets of conventional nanotechnology (1-10nm) and micro-technology (>1μm). Due to a lack of fundamental technologies, the fluidics and chemistry have not been explored well. Our research group has proposed and studied a method to fabricate micro channel on PDMS chip by machining, named as the cryogenic micromachining method. Since PDMS changes from rubbery state to glassy state below its glass transition temperature, PDMS could be machined with high accuracy under cryogenic condition. For precision enhancement, it is necessary to prevent the PDMS at cutting area from being overheated. Then, we made research to remove cutting heat efficiently. By adding liquid nitrogen to the cutting area directly and continuously, heat flux could be forced to direct towards the tool and it helps to remove the heat from PDMS efficiently. To keep the direction of heat flux toward the tool leads to machining PDMS at glassy state and obtaining fine quality machined surface. In addition, there is possibility to fabricate a chip with sub-micro scale form accuracy.
一般社団法人日本機械学会の論文
2011-09-25