A26 フェムト秒レーザによるサファイア単結晶面の微細溝加工(OS9 レーザ応用加工(1))

概要

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In this paper, ablation of sapphire by femtosecond laser pulses under static irradiation and line-scanning experiment was carried out. Under static irradiation, for single laser pulse irradiation, two ablation phases were observed and the threshold fluences of the two ablation phases were calculated. In line-scanning experiment, microgroove was fabricated under different experimental conditions. The relation between the width and depth of the groove and key parameters of femtosecond laser was obtained. The surface quality of the fabricated microgrooves could be improved through increasing the number of laser scans. The width and depth of the groove was not affected by the number of laser scans. Several samples of the parallel microgrooves and microstructures were fabricated by femtosecond laser pulses.
一般社団法人日本機械学会の論文
2010-11-19