218 3次元形状モデルを用いたMEMS工程設計システムの研究 : パラメトリックなデバイス・工程連動設計変更機能の実現(OS2-4 先進システムの構築)

概要

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This paper proposes new 3D process planning system for MEMS device manufacturing. The process planning system can derive fabrication process from 3D MEMS device models based on the deposition precedence relationships between fabrication features. The basic of the method for the process planning was proposed by previous papers. The system can derive the fabrication process and the device model estimated to be fabricated by the fabrication process. And the shape of the device model which is difficult to fabricate is modified to fabricate shape, but it is likely to become the shape without satisfying the design specifications. To solve the problem, this paper proposes a redesign function which enables the designer to redesign the modified device model which has a manufacturable shape and satisfy the design specification based on the association of the device shape with the fabrication process.
一般社団法人日本機械学会の論文
2010-03-12