T1601-3-3 高輝度大気圧マイクロプラズマ([T1601-3]マイクロナノメカトロニクス(3))

概要

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We developed atmospheric inductively coupled micro-plasma source towards miniaturized light source. The micro-plasma source consists of a glass capillary tube(O.D.:φ1.5mm, I.D.:φ1mm), antenna coil (2.5 turns), and a thin metal wire(φ0.1mm). The thin metal wire plays a role of supplying electrons for plasma ignition through inductive coupling. Thereby, additional high-voltage power source for plasma ignition is not necessary, which is usually necessary for many cases. Our method is suitable to make the micro-plasma source compact. He gas is used for achieving plasma ignition at low power (10-30W). High intensity plasma was obtained by increasing the power and exchanging He gas with Ar. We investigated the wire material for lower power operation. Basic characteristics of the micro-plasma source are discussed in terms of plasma ignition, optical emission spectra, etc.
一般社団法人日本機械学会の論文
2010-09-04