D18 ガラスのレーザスクライブにおける予亀裂導入モデルによる熱弾性解析(OS-9 レーザ応用加工(2))

概要

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In the laser scribing of a glass, a crack is propagated when the surface is cooled down immediately after CO_2 laser is irradiated. In this process, scribable conditions and the crack depth are influenced depending on various parameters such as laser power, scribe velocity, and the distance between the heating area and the cooling area. Therefore, it is important to estimate the scribable conditions by the analysis. We analyzed crack propagation phenomena by a finite element method, using a model with a pre-crack. The crack depth was evaluated by calculating the stress intensity factor at the crack tip. The obtained conclusions are as follows: By giving a suitable threshold of the stress intensity factor, the crack depth can be estimated by a thermal elasticity analysis. The propagation velocity of a crack shows almost the same tendency, even when the scribe condition is different.
社団法人日本機械学会の論文
2008-11-21