レーザアブレーションにおける蒸発粒子の飛散

概要

論文の詳細を見る
Laser ablation process of aluminum with the fourth harmonics of Nd : YAG laser is simulated using the modified molecular dynamics, which has been developed previously by Ohmura and Fukumoto. Scattering velocities and their angles of ablation particles are visualized using vectors. Distribution and its transition of both scattering angles and velocities are investigated quantitatively. Transition of the number of ablation atoms and particles is also studied. The authors have already clarified that there are two types in laser ablation process. In this study, it is cleared that distribution of scattering angles and velocities of ablation particles depends on these ablation types. Transition of the number of ablation atoms and particles also depend on the ablation types. On the other hand it is independent of the ablation type that the scattering angles have almost normal distribution and the number of particles increases little by little during the scattering process because large ablation particles are decomposed to smaller ones.
公益社団法人精密工学会の論文
2001-11-05