2310 High Yield Batch Fabrication of Micro Spiral Beam for Multi-input Multi-output Optical Switch
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概要
- 論文の詳細を見る
We present the result of application of an etch-stop technique in the chip level fabrication process in order to improve the button flatness and depth variation of bulk micromachined cavities. The chips will be used in micro mirror manipulator device as an optical switch in a multi-input multi-output scheme. In order to increase the process yield, we tried to use a 1μm Silicon Nitride membrane as an etch-stop layer and pattern carrying membrane to increase the process yield in the batch fabrication stage.
- 一般社団法人日本機械学会の論文
- 2008-04-20
著者
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Horie Mikio
Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Kamiya Daiki
Precision & Intelligence Laboratory Tokyo Institute Of Technology
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SADAT Seid
Interdisciplinary Graduate School of Science & Engineering, Tokyo Institute of Technology
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Sadat Seid
Interdisciplinary Graduate School Of Science & Engineering Tokyo Institute Of Technology
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