2 Degree-of-Freedom Spiral Micromirror Manipulator : Fabrication and Spatial Mechanical Assembling

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概要

• 論文の詳細を見る

• We present a process for the fabrication and assembly of a novel spiral-shaped micromirror manipulator for free space optical switching. The manipulator is comprised of two different parts, which are fabricated using conventional surface micromachining processes. The footprint of the assembled device is about 600μm and the height of the micro pyramid is 200μm. In spite of conventional approaches to microsystem design, which prefer devices with monolithic and self-assembling properties, the two parts are fabricated on two different chips. They are then assembled using a spatial mechanical approach. A number of separate spiral and pyramid parts are fabricated and the first assembling test on a single actuator is performed. In this paper, the Surface micromachining processes used for fabrication of the parts are presented and their sensitivity and issues are discussed. Spatial mechanical assembly results are presented and process issues are addressed.

著者

• Kamiya Daiki

  Precision & Intelligence Laboratory Tokyo Institute Of Technology

• SADAT Seid

  Interdisciplinary Graduate School of Science & Engineering, Tokyo Institute of Technology

• BAGHERI Saeed

  School of Engineering, Tokyo Institute of Technology

• HORIE Mikio

  Interdisciplinary Graduate School of Science & Engineering, Tokyo Institute of Technology

関連論文

• PRE-06 NEW SURFACE MOUNT SYSTEM COMPOSED OF PLASTIC MINIATURE PANTOGRAPH MECHANISMS AND A POSITIONING TABLE(MM/Micro/Nano Precision Equipments II,Technical Program of Oral Presentations)
• 2310 High Yield Batch Fabrication of Micro Spiral Beam for Multi-input Multi-output Optical Switch
• 2 Degree-of-Freedom Spiral Micromirror Manipulator : Fabrication and Spatial Mechanical Assembling
• P-MMT-02 DESIGN AND MANUFACTURING OF MICRO MECHANISM ELEMENTS OF 2-DOF MICROMANIPULATOR

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