製織型フレキシブルシートデバイス用圧電薄膜被覆繊維の開発(<小特集>第1回マイクロ・ナノ工学シンポジウム)

概要

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In the present study, we have proposed the flexible piezoelectric sensor by weaving functional fibers with piezoelectric thin films. The flexible piezoelectric sensor is composed of conductive fibers as warp and functional fibers with piezoelectric thin film and patterned electrode as weft. Applying force onto patterned electrode generate voltage through piezoelectric effect. By scanning voltages of nodes of warp and weft, the flexible piezoelectric sensor can work as touch sensor. We have applied die coating, which hes been utilized for protective layer of optical fibers, to realize high-speed PZT thin films deposition on fibers. 1μm thick PZT thin films has been successfully deposited on 200μmφ stainless fibers by die coating.
2010-08-25