1331 磁歪材料を用いた運動機能素子に及ぼす基板種類と厚さの影響(J14-7 知的材料・構造システム(7) 各種アクチュエータ,ジョイントセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Influences of deformation resistance on bending motion angle, strain and force of composite mover device driven by magnetic field of Fe-45at%Pd alloy thin film deposited on titanium, substrate thickness by direct current magnetron sputtering process were investigated. When the residual gas pressure before argon sputtering and the sputtering pressure of argon gas (5 N) were less than 5.0×10^<-4> Pa and 2.0×10^<-1> Pa, respectively, the thickness of the Fe-45at%Pd films deposited was about 2.5μm. Bending motion strain of Fe-45at%Pd alloy film largely depended on the bending deformation resistance controlled by substrate thickness from 50 to 300μm. The largest strain of bending motion induced by magnetic field and its highest susceptibility were found in the Fe-45%Pd alloy film deposited on titanium thin sheet of 50μm thickness.
社団法人日本機械学会の論文
2008-08-02