205 磁歪薄膜複合運動素子の研究開発(マルチフェロイクス)

概要

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Giant magnetostrictive alloys (GMA) obtained have advantages of high responsiveness, high power and low voltage driving. Influences of magnetostrictive thin film on different substrate sheet, composite mover device with both Fe-Tb/Fe-Sm alloy thin films on each side silicon substrate surface, composite mover device with both Fe-Pd/Fe-Sm alloy thin films on each side copper substrate surface of prepared by D.C. magnetron sputtering process were investigated.
一般社団法人日本機械学会の論文
2006-11-25