1330 水素吸蔵合金運動薄膜の駆動制御に関する基礎的研究(J14-7 知的材料・構造システム(7) 各種アクチュエータ,ジョイントセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Hydrogenation operated bending motion device, which was a platinum coated LaNi_5 hydrogen storage alloy film deposited on a polyimide sheet at elevated temperatures, had been successfully developed. When the substrate temperature was 373K, the strain (Δε) was 550ppm, which displacement was 1.8 times larger than that (300ppm) at room temperature (323k). LaNi_5 alloy thin films were prepared by DC magnetron sputtering process at different substrate temperatures from 323K to 525K and different Ar gas pressure from 0.4 Pa to 1.0 Pa. As a result, the bending motion after 10000s, there sample expressed different bending motion strain at each DC magnetron sputtering process.
社団法人日本機械学会の論文
2008-08-02