水素吸蔵合金薄膜アクチュエーターの触媒処理による高速化(J09-6 プロセス,J09 知的材料・構造システム)

概要

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In this study, the effect of the surface treatment on mechanical response of LaNi_5 thin film actuator deposited on polyimide substrates was investigated. Since this actuator could be reversibly driven by hydrogen pressure control, this actuator is expected as a sensor and/or controller of hydrogen gas flux in various hydrogen related devices. In the experiments, initiating time of the actuation after hydrogen gas exposure is tremendously reduced by surface treatment. This significantly modified mechanical response is attributed to switching of the reaction rate determining steps. Dissociation of hydrogen gas molecules on the sample surface is considered to be changed to permeation/diffusion of hydrogen atoms in the film by the surface treatment treatment. Furthermore, we concluded that the high responsiveness, induced by the treatment, was caused by not only hydrogen migration rate, but also hydrogen solubility limit at room temperature.
社団法人日本機械学会の論文
2004-09-04