D-1 水熱合成PZT多結晶膜を用いた1Dアレイ医用超音波プローブに関する基礎研究 : 一次元アレイ超音波プローブの試作と音響特性の評価(医用超音波)

概要

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We have deposited PZT poly-crystalline film on the titanium substrate using hydrothermal method, and have developed transducers for ultrasound probes. In this time, the 10 MHz medical miniature 1-dimensional array type ultrasound probe with hydrothermally PZT poly-crystalline films is developed. After sputtering of titanium on the surface of hydroxyapatite substrate, the titanium film was etched using photolithography method to form 1-dimensional titanium film electrodes array. Then we could succeed fabricating the miniature 1-dimensional array type ultrasound probe by hydrothermal method. Transmitted ultrasound pulse from 10 MHz commercial ultrasound probe was received by the trial fabricated 1-dimentional array type ultrasound probe. The fabrication process of the probe, received waveform and power spectrum etc are reported in this paper.
2006-11-15