1118 静電駆動型DM(Deformable Mirror)の開発 : 第2報:静的特性の解析(要旨講演,マイクロメカトロニクス)

概要

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To apply an adaptive optics to a retinal camera, we developed an electrostatic driven DM (Deformable Mirror) with 85 electrodes. At now, there are two kinds of DM. One is a division mirror type that mirror structure has a minute mirror array, and the other is a continuous mirror type that mirror structure is a one membrane. We selected a continuous mirror type, because it was simple structure and could correct for larger wavefront aberration. However, there was a trade-off that the control method becomes complex. So we performed FEM (Finite Element Method) based Electrostatic-Structural coupled analysis with consideration of internal stress to predict DM deflection. As a result, the FEM simulated results showed good consistency with the measured results.
社団法人日本機械学会の論文
2007-03-19