固体高分子電解質で被覆したタングステン微小電極による固体電気化学微細加工(<特集>希土類系物質の精密合成,形態制御および機能物性)

概要

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Electrochemical micromachining of a metal plate was performed using a solid polymer electrolyte. The fundamental electrolysis system was composed of a metal plate (anode) |polymer electrolyte| tungsten needle (cathode), where the contact diameter of the metal |polymer interface was extremely small (a few μm). The metal substrate was electrochemically oxidized and then M^<n+> ions migrated to the polymer electrolyte. As a result of the continuous application of a dc voltage to the cell, finer-resolution micromachining (〜10μm) was achieved under room-temperature operation as compared with our previous results obtained using a Na-β^n-Al_2O_3 solid electrolyte. Furthermore, the present technique was applicable to many different kinds of metal substrates.
2007-10-01