Effects of Various Facility Factors on Chemical Mechanical Polishing Process Defects
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-11-15
著者
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Kim Sang-yong
Fab Division Anam Semiconductor Co. Inc.
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SEO Yong-Jin
Department of Electrical Engineering, DAEBUL University
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Seo Yong-jin
Department Of Electrical Engineering Daebul University
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Seo Yong-jin
Department Of Electrical And Electronics Engineering Daebul University
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Seo Yong-Jin
Department of Electrical and Electronic Engineering, Daebul University, 72 Sanhoi, Samho, Youngam, Chonnam-do 526-702, Korea
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- Effects of Various Facility Factors on Chemical Mechanical Polishing Process Defects
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