Kim Sang-yong | Fab Division Anam Semiconductor Co. Inc.

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概要

• 同名の論文著者
• Fab Division Anam Semiconductor Co. Inc.の論文著者

関連著者

• Kim Sang-yong

  Fab Division Anam Semiconductor Co. Inc.

• SEO Yong-Jin

  Department of Electrical Engineering, DAEBUL University

• LEE Woo-Sun

  Department of Electrical Engineering, CHOSUN University

• Seo Yong-jin

  Department Of Electrical Engineering Daebul University

• Seo Yong-jin

  Department Of Electrical And Electronics Engineering Daebul University

• Seo Yong-Jin

  Department of Electrical and Electronic Engineering, Daebul University, 72 Sanhoi, Samho, Youngam, Chonnam-do 526-702, Korea

• Lee W‐s

  Korea Electronics Technology Institute

• Park J‐s

  Hanyang Univ. Kyunggido Kor

• Lee Woo-sun

  Korea Electronics Technology Institute

• PARK Jin-Seong

  Department of New Material Engineering, CHOSUN University

• Park Jin-seong

  Department Of Advanced Materials Engineering Chosun University

• Kim S‐y

  Samsung Electronics Co. Ltd. Kyunggi‐do Kor

• Kim Sang-Yong

  FAB Division, ANAM Semiconductor Co., Inc., Kyounggi-do 420-130, Korea

• Lee Woo-Sun

  Department of Electrical Engineering, CHOSUN University, Kwang-Ju 501-759, Korea

• Seo Yong-Jin

  Department of Electrical Engineering, Daebul University, Chonnam-do 526-702, Korea

• Park Jin-Seong

  Department of New Material Engineering, CHOSUN University, Kwang-Ju 501-759, Korea

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著作論文

• Motor-Current-Based Real-Time End Point Detection of Shallow-Trench-Isolation Chemical Mechanical Polishing Process Using High-Selectivity Slurry
• Effects of Various Facility Factors on Chemical Mechanical Polishing Process Defects
• Motor-Current-Based Real-Time End Point Detection of Shallow-Trench-Isolation Chemical Mechanical Polishing Process Using High-Selectivity Slurry

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