LEE Woo-Sun | Department of Electrical Engineering, CHOSUN University
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概要
関連著者
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LEE Woo-Sun
Department of Electrical Engineering, CHOSUN University
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Kim Sang-yong
Fab Division Anam Semiconductor Co. Inc.
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Seo Yong-jin
Department Of Electrical And Electronics Engineering Daebul University
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Seo Yong-Jin
Department of Electrical Engineering, Daebul University, Chonnam-do 526-702, Korea
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Seo Yong-Jin
Department of Electrical and Electronic Engineering, Daebul University, 72 Sanhoi, Samho, Youngam, Chonnam-do 526-702, Korea
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Lee W‐s
Korea Electronics Technology Institute
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Park J‐s
Hanyang Univ. Kyunggido Kor
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Lee Woo-sun
Korea Electronics Technology Institute
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SEO Yong-Jin
Department of Electrical Engineering, DAEBUL University
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PARK Jin-Seong
Department of New Material Engineering, CHOSUN University
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Seo Yong-jin
Department Of Electrical Engineering Daebul University
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Park Jin-seong
Department Of Advanced Materials Engineering Chosun University
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Kim S‐y
Samsung Electronics Co. Ltd. Kyunggi‐do Kor
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Kim Sang-Yong
FAB Division, ANAM Semiconductor Co., Inc., Kyounggi-do 420-130, Korea
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Lee Woo-Sun
Department of Electrical Engineering, CHOSUN University, Kwang-Ju 501-759, Korea
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Lee Woo-Sun
Department of Electrical Engineering, Chosun University, Gwangju 501-759, Korea
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Kim Nam-Hoon
Research Institute of Energy Resources Technology, Chosun University, Gwangju 501-759, Korea
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Park Jin-Seong
Department of New Material Engineering, CHOSUN University, Kwang-Ju 501-759, Korea
著作論文
- Motor-Current-Based Real-Time End Point Detection of Shallow-Trench-Isolation Chemical Mechanical Polishing Process Using High-Selectivity Slurry
- Effects of Silica Slurry Temperature on Chemical Mechanical Polishing for Tetraethyl Orthosilicate Film
- Motor-Current-Based Real-Time End Point Detection of Shallow-Trench-Isolation Chemical Mechanical Polishing Process Using High-Selectivity Slurry