Stress-Induced Nucleation of Microcrystalline Silicon from Amorphous Phase
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-05-15
著者
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FUJIWARA Hiroyuki
National Research Institute for Earth Science and Disaster Prevention
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Kondo Michio
National Institute Of Advanced Industrial Science And Technology (aist)
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Matsuda Akihisa
National Institute Of Advanced Industrial Science And Technology
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Matsuda Akihisa
National Institute Of Advanced Industrial Science And Technology (aist)
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Fujiwara Hiroyuki
National Institute Of Advanced Industrial Science And Technology (aist)
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Kondo Michio
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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