2636 レーザーCVD法によるカーボンナノファイバーボールの合成(S75-2 先端材料とレーザー加工(2),S75 先端材料とレーザー加工)

概要

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Sphere shaped carbon particles consisted of carbon fiber has a diameter of 20nm to 2000nm, nano-fiber ball (NFB), was synthesized by laser chemical vapor deposition at the high growth rate. An Ar ion laser with the wavelength of 514nm was focused on a Ni coated glass plate in a chamber filled with sulfur-added hydrocarbon gases. Those gases were thermally decomposed in the vicinity of focal spot, and then NFBs were formed at high growth rate. From video camera observations, the growth rate was evaluated about 0.1mm/s. Transmission electron microscope observations of NFBs showed that metal particles with few tens nanometer existed on tip of nano-fibers. This result indicates catalytic growth. We discuss about the growth mechanism of NFBs and dependence of catalysis thickness on NFBs growth.
社団法人日本機械学会の論文
2005-09-18